TEL:+81-45-507-3313

In-line type Excimer172 Cleaning and treatment system for large substrate

Excimer UVO3 system Inline type


Features  Features

  • Equipped with processing gas control function
  • For large substrate in-line processing
  • Equipped with interlock device for safet
  • Ozone exhaust processing unit (option)

Application Tags:

172nm @en
Excimer uv @en
UV cleaning
UV surface modifications
UVOzone
UV洗浄 @en
エキシマランプ @en
エキシマ照射装置 @en
ドライ洗浄 @en
ポリイミド改質 @en
密着性改善 @en
濡れ性改善 @en
紫外線照射装置 @en
表面改質 @en

Contact Us

  • 23-15, Mominokidai, Aoba-ku Yokohama-shi, Kanagawa, 225-0026, Japan
  • info@excimer.co.jp
  • TEL:+81-45-507-3313
  • Monday - Friday:
    9:00 am - 17:00 pm
    Saturday - Sunday: Closed

Are recommending the most suitable model fitting your use and environment through our long, abundant experience
Contact us here

Contact Us
  • Address:
    23-15, Mominokidai, Aoba-ku Yokohama-shi, Kanagawa, 225-0026, Japan
  • TEL:+81-45-507-3313
  • Email: info@excimer.co.jp
  • Monday - Friday: 9:00 am - 17:00 pm
    Saturday - Sunday: Closed
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