TEL:+81-45-507-3313

Excimer 172 Cleaning and treatment system of stand-alone type

Model EC300-3 Excimer UVO3 system


Features  Features

  • Capable of in-line processing of large substrate  
  • Equipped with processing gas control function
  • Equipped with interlock device for safety

 Specifications

Wavelength 172 nm
Lamp emitting path MIN 300 - MAX 1500 mm (various sizes selectable)
Functions Various types of monitors, failure alarm function
Power AC180-240V, 50/60Hz, 15A
AC180-240V, 50/60Hz, 15A W2400 x D500(2000) x H1350 mm
Weight 150kg
150kg 1m3/min, 50A
150kg Ozone filter、Ozone exhaust unit, Processing gas supply system

Application Tags:

172nm @en
Excimer uv @en
UV cleaning
UV Lamp @en
UV surface modifications
UVOzone
UV洗浄 @en
UV装置 @en
エキシマランプ @en
エキシマ照射装置 @en
ドライ洗浄 @en
ポリイミド改質 @en
密着性改善 @en
濡れ性改善 @en
紫外線 @en
紫外線照射装置 @en
表面改質 @en

Contact Us

  • 23-15, Mominokidai, Aoba-ku Yokohama-shi, Kanagawa, 225-0026, Japan
  • info@excimer.co.jp
  • TEL:+81-45-507-3313
  • Monday - Friday:
    9:00 am - 17:00 pm
    Saturday - Sunday: Closed

Are recommending the most suitable model fitting your use and environment through our long, abundant experience
Contact us here

Contact Us
  • Address:
    23-15, Mominokidai, Aoba-ku Yokohama-shi, Kanagawa, 225-0026, Japan
  • TEL:+81-45-507-3313
  • Email: info@excimer.co.jp
  • Monday - Friday: 9:00 am - 17:00 pm
    Saturday - Sunday: Closed
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